Course Description

This course will introduce the basic theory of MEMS components and guide students to perform hands-on work on MEMS components, covering common MEMS processes, component design and simulation, photomask layout, and introduction to the basic operating principles of each MEMS component. 

The teaching method is divided into four parts: 

(1) Introduction to basic mechanics. 

(2) Introduction to microelectromechanical processes. 

(3) Simulation and design of microelectromechanical components. 

(4) Practical planning and problem discussion.

Course Objectives

1. Basic knowledge of micro-electrical process equipment

2. Theory of MEMS component design

3. Practical work on MEMS components